조회수 : 2008
Introduction to Microelectromechanical (Mem) Microwave Systems
Hector J. De Los Santos
“...a timely book that is both an excellent introduction to MEMS and a survey of the state of the art. I recommend the book. The writing style and the drawings are clear, making it a pleasure to read. It is quite suitable for self-study, and there are references that allow the reader to follow up on many topics.”
---Microwave Magazine, March 2001
“The text is particulaly clear in its presentation and manages to combine mechanical, electrical and physical descriptions with much harmony. For those readers interested in a quick and clear introduction to MEMS technology, this book fits the bill precisely.”
---Microwave Journal, June 1999
Microelectromechanical systems (MEMS) applications in RF and microwave electronics are on the verge of revolutionizing wireless communications. Now you can sharpen your understanding of this emerging field with this comprehensive new book that explains the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book뭩 unique presentation integrates circuit fabrication technology, device design-oriented materials, mechanical, and microwave considerations, and RF/microwave electronics to give engineers and managers a clear understanding of the potential and limitations of MEMS in electronic communications. This valuable book enables you to...
Determine which applications can benefit most from a MEMS solution
Select the appropriate MEMS technology for a given application
Integrate MEMS into conventional planar MIC and MMIC fabrication processes
Identify the pitfalls of MEM devices/technologies
Use MEMS technology to reduce system size, weight, and cost
An excellent reference for practicing RF and microwave, design and research engineers and managers who wish to understand and exploit novel methods to optimize their designs. A perfect text for students hoping to effectively grasp this new technology.
Contents: Microelectromechanical Systems: MEMS Origins. MEMS Impetus/Motivation. MEMS Fabrication Technologies. Fundamental MEMS Device Physics: Actuation. Fundamental MEMS Devices: The Cantilever Beam. Microwave MEMS Applications: MEM Switch Design Considerations. The Micromachined Transmission Line. MEMS-Based Microwave Circuits and Systems.
H?tor J. De Los Santos is a Scientist/Director of Future Enabling Technologies IR&D Program at the Hughes Space and Communications Company. He holds a Ph.D. in Electrical Engineering from Purdue University and is Senior Member of the IEEE and Member of Tau Beta Pi, Eta Kappa Nu, and Sigma Xi.
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